EMF @NUS College of Design and Engineering E7 Building Level 1 Singapore 119276
What it is: The Versa 3D DualBeam FEG FIB-SEM combines a focused Ga ion beam with a high-resolution field-emission electron gun.
Manufacturer: Thermo Fisher Scientific
Model Name: FEI Versa 3D
Applications: FIB, SEM
Instrument Overview: The Versa 3D Dual Beam FEG FIB-SEM combines a focused Ga ion beam with a high-resolution field-emission electron gun. Owing to a large chamber allowing up to 6″ industry wafers with full rotation, the Versa 3D provides enhanced 2D and 3D materials characterization and analysis for a wide range of material science and industry-related samples.
Charges: User operated (NUS) – $80/hour; Staff-assisted User (NUS) – $280/hour; Staff-assisted User (External) – $450/hour
