Facility Address: 6 Fusionopolis Way, Synthesis, Singapore 138636
A dual beam FIB system for imaging, TEM lamella preparation, cross-section failure analysis and direct patterning.
Manufacturer: ThermoFisher Scientific
Model Name: Helios NanoLab 600
Instrument overview:
The FEI Helios 600 FIB is a dual beam FIB system equipped with both Ga+ ion and electron microscopy capabilities for imaging, TEM lamella preparation, cross-section failure analysis and direct patterning. It combines the Elstar electron column for high-resolution, high-contrast imaging with the high-performance Sidewinder ion column for fast, precise cross sectioning. This instrument offers a range of beam chemistries including platinum and insulator (SiO2) deposition utilizing both ion and electron beams.
Technical features and specifications:
Ion source: Galium ion liquid metal ion source (LMIS), operate from 2 – 30kV.
Electron source: Field emission gun (FEG), operate from 350eV – 30keV.
Resolution: 5nm at 30kV (Ion Beam); 0.9nm at 15kV (SEM)
Detectors: Everhart-Thornley Secondary Electron, In-lens Secondary Electron
Gas Injection Systems: Platinum and insulator (SiO2)
Sample size: Maximum 150 mm diameter with full travel.
Key Contacts:
Teo Siew Lang sl-teo@imre.a-star.edu.sg
Hui Hui Kim hk-hui@imre.a-star.edu.sg
