Facility Address: 6 Fusionopolis Way, Synthesis, Singapore 138636
An advanced dual beam FIB system for imaging, TEM lamella preparation, cross-section failure analysis and direct patterning.
Manufacturer: ThermoFisher Scientific
Model Name: Helios NanoLab 450S
Instrument overview:
The FEI Helios 450S FIB is an advanced dual beam FIB system equipped with both Ga+ ion and electron microscopy capabilities for imaging, TEM lamella preparation, cross-section failure analysis and direct patterning. It integrates the innovative Elstar™ electron column with UC monochromator technology for high-resolution, high-contrast imaging, alongside the high-performance Tomahawk™ ion column for rapid and precise sample cross sectioning. This versatile instrument offers a range of beam chemistries including platinum, carbon, and insulator (SiO2) deposition utilizing both ion and electron beams, enhanced with Energy Dispersive X-ray Spectroscopy (EDS) for compositional analysis.
Technical features and specifications:
Ion source: Galium ion liquid metal ion source (LMIS), operate from 500V – 30kV.
Electron source: Field emission gun (FEG), operate from 50eV – 30keV.
Resolution: 4.5nm at 30kV (Ion Beam); 0.8nm at 15kV (SEM)
Detectors: Elstar in-lens SE and BSE detection, Everhart-Thornley SE detector, Ion Conversion and Electron (ICE) detector, Concentric backscattered detector, Silicon drift detector for EDS analysis
Gas Injection Systems: platinum, carbon, and insulator (SiO2)
Sample size: Maximum 80 mm diameter with full travel.
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Key Contacts:
Teo Siew Lang sl-teo@imre.a-star.edu.sg
Hui Hui Kim hk-hui@imre.a-star.edu.sg
